Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have investigated the room-temperature phonon density of states for several compounds in the YBa2Cu3Ox family using inelastic neutron scattering. Substantial variations are observed as a function of oxygen concentration, across the entire frequency range (0-90 meV). Near the high frequency cut-off, the spectral weight of the distribution shifts upwards by ≈ 10 meV, between x = 7.0 and x = 6.0. This shift is tentatively ascribed to enhanced electron-phonon coupling in the superconducting compound. Our interpretation is substantiated by complementary data on a non-superconducting Co-doped sample. © 1988.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
T. Schneider, E. Stoll
Physical Review B