Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have investigated the room-temperature phonon density of states for several compounds in the YBa2Cu3Ox family using inelastic neutron scattering. Substantial variations are observed as a function of oxygen concentration, across the entire frequency range (0-90 meV). Near the high frequency cut-off, the spectral weight of the distribution shifts upwards by ≈ 10 meV, between x = 7.0 and x = 6.0. This shift is tentatively ascribed to enhanced electron-phonon coupling in the superconducting compound. Our interpretation is substantiated by complementary data on a non-superconducting Co-doped sample. © 1988.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Mark W. Dowley
Solid State Communications
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures