Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A universal method for representing solutions of the initial value problem ut = −2πiDu is presented for a large class of pseudo‐differential operators. The representations take the form of a path integral‐like operator. Three numerical approaches for evaluating these operators are treated. Practical interest in such universal methods depends on massively parallel computing systems. Copyright © 1990 Wiley Periodicals, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Guillaume Buthmann, Tomoya Sakai, et al.
ICASSP 2025
R.A. Brualdi, A.J. Hoffman
Linear Algebra and Its Applications
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences