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Single and dual wavelength exposure of photoresist
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We describe an effective method for doing binary-encoded modeling, in the context of 0/1 linear programming, when the number of feasible configurations is not a power of two. Our motivation comes from modeling all-different restrictions. © 2005 Elsevier B.V. All rights reserved.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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