Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
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A general theorem concerning the parallel representation of systems is proved, using the also general notions of terminal factorization situation and quotient in a category. Applications are given to the decomposition and synthesis of a number of kinds of systems. © 1976.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Active Matrix Liquid Crystal Displays Technology and Applications 1997
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
Martin Charles Golumbic, Renu C. Laskar
Discrete Applied Mathematics