Frank R. Libsch, S.C. Lien
IBM J. Res. Dev
No abstract available.
Frank R. Libsch, S.C. Lien
IBM J. Res. Dev
Fan Jing Meng, Ying Huang, et al.
ICEBE 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Limin Hu
IEEE/ACM Transactions on Networking