D.R. Young, H. Kräutle, et al.
JES
Paper
Orientation Dependence of Built-in Surface Charge on Thermally Oxidized Silicon
Abstract
No abstract available.
Related
S.C. Jain, P. Balk, et al.
ESSDERC 1991
R.A. Connell, L.V. Gregor
JES
J.M. Eldridge, R.B. Laibowitz, et al.
Journal of Applied Physics