Orientation Dependence of Built-in Surface Charge on Thermally Oxidized Silicon

R.A. Connell, L.V. Gregor

JES

P. Balk

JES

G.W. Rubloff, R.M. Tromp, et al.

JVSTA

S.C. Jain, P. Balk, et al.

ESSDERC 1991