Optical optimization of line deletion and personalization parameters on polymide films

Abstract

The optical characterization of several polyimide films is made. These results allow us to choose selectively laser parameters for successful line deletion on these insulating films. An N2-pumped dye laser (0.59μm) and a Q-switched Nd-YAG laser (1.064μm) with empirically determined pulse energy and pulse width are used on three different polyimide films to illustrate this technique. Both line deletion on and fabrication of vias in the polyimide films are performed with good results. © 1981.