U. Gerlach-Meyer, J.W. Coburn, et al.
Surface Science
The addition of a small concentration of suitably chosen noble gas to a reactive plasma is shown to permit the determination of the functional dependence of reactive particle density on plasma parameters. Examples illustrating the simplicity of this method are presented using F atomic emission from plasma-etching discharges and a comparison is made to available data in the literature.
U. Gerlach-Meyer, J.W. Coburn, et al.
Surface Science
J.W. Coburn
Journal of Applied Physics
C.D. Tesche, K.H. Brown, et al.
International Conference on Low Temperature Physics (LT) 1983
J.W. Coburn
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films