Publication
Journal of Applied Physics
Paper

Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density

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Abstract

The addition of a small concentration of suitably chosen noble gas to a reactive plasma is shown to permit the determination of the functional dependence of reactive particle density on plasma parameters. Examples illustrating the simplicity of this method are presented using F atomic emission from plasma-etching discharges and a comparison is made to available data in the literature.

Date

09 Jul 2008

Publication

Journal of Applied Physics

Authors

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