A.C. Tam, H. Sontag, et al.
Chemical Physics Letters
The propagation of photoacoustic pulses in thin silicon wafers is studied by a probe-beam deflection method. A comparison with transducer measurements is made, which suggests the existence of a nonpropagating plate mode. A signal-to-noise analysis is carried out, and the sensitivity of this detection scheme is analyzed for the case of high-frequency broad-band detection.
A.C. Tam, H. Sontag, et al.
Chemical Physics Letters
A.C. Tam, W. Zapka, et al.
SPIE Microelectronic Processing Integration 1991
A.C. Tam, B. Bhushan
Journal of Applied Physics
A. Schenzle, R.G. Devoe, et al.
Applied Physics B Photophysics and Laser Chemistry