Conference paper
Laser cleaning of surface contaminants
A.C. Tam, Hee K. Park, et al.
CLEO/Pacific Rim 1997
The propagation of photoacoustic pulses in thin silicon wafers is studied by a probe-beam deflection method. A comparison with transducer measurements is made, which suggests the existence of a nonpropagating plate mode. A signal-to-noise analysis is carried out, and the sensitivity of this detection scheme is analyzed for the case of high-frequency broad-band detection.
A.C. Tam, Hee K. Park, et al.
CLEO/Pacific Rim 1997
A.C. Tam, W.P. Leung, et al.
Journal of Applied Physics
A.C. Tam, W.P. Leung
Applied Physics Letters
W. Zapka, M. Levenson, et al.
Optics Letters