William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Shu Tezuka
WSC 1991
James Lee Hafner
Journal of Number Theory
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007