E. Burstein
Ferroelectrics
A detailed study on the scaling property of trench isolation capacitance for advanced high-performance bipolar applications is presented. Using two-dimensional numerical simulations, it is shown that depending on the particular trench used, the trench isolation capacitance has a distinct dependence on the trench width. The impact on the scaled-down high-performance ECL circuits is examined. It is concluded that the design and optimization of scaled-down devices and circuits would require an in-depth understanding of the trench isolation parasitics to realize the full potential of advanced technology.
E. Burstein
Ferroelectrics
M.V. Fischetti, S.E. Laux
IEDM 1989
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011