Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In analogy to omittable lines in the plane, we initiate the study of omittable planes in 3-space. Given a collection of n planes in real projective 3-space, a plane Π is said to be omittable if Π is free of ordinary lines of intersection - in other words, if all the lines of intersection of Π with other planes from the collection come at the intersection of three or more planes. We provide two infinite families of planes yielding omittable planes in either a pencil or near-pencil, together with examples having between three and seven omittable planes, examples that we call "sporadic," which do not fit into either of the two infinite families.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Charles Micchelli
Journal of Approximation Theory
Yixiong Chen, Weichuan Fang
Engineering Analysis with Boundary Elements
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008