Off-state current and performance analysis for double-gate CMOS with non-self-aligned back gate

Numerical simulation-based study of double-gate (DG) field-effect transistors (FETs) leads to the possibly viable concept of extremely scaled but nonself-aligned DG CMOS. Predictions of off-state current, on-state current, and circuit performance, accounting for short-channel effects and energy-quantization effects, in 25-nm DG FETs suggest that moderate back-gate underlap does not severely undermine the superior performance and leakage current of nanoscale DG CMOS relative to those of bulk-Si CMOS. The reverse back-gate biasing scheme for leakage reduction in DG CMOS is shown to be much more efficient than the reverse body biasing scheme in bulk Si even with moderate back-gate underlap. © 2005 IEEE.