E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Neutron reflectivity (NR) and dynamic secondary ion mass spectroscopy (DSIMS) were used to study compositional variations as a function of film depth in thin polymeric nanofoam films formed from triblock copolymers containing 15 wt%, 13 kg/mol polypropylene oxide end blocks with a fluorinated polyimide center block. The triblock copolymer films were spun cast and imidized on silicon substrates and showed an excess amount of polyimide present at both the air/film and film/substrate interfaces. Upon foaming the films showed a slight densification, and the formation of a 50- 150 Å thick polyimide skin at the air interface. The final nanofoam materials had a calculated porosity of roughly 20 vol.% in the center portion of the film. (C) 1999 Elsevier Science Ltd.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989