Sung Ho Kim, Oun-Ho Park, et al.
Small
Paper
New techniques for diffusion studies of thin polymer films
Abstract
No abstract available.
Related
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry