Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We study multihomogeneous analytic functions and a multihomogeneous Newton's method for finding their zeros. We give a convergence result for this iteration and we study two examples: the evaluation map and the generalized eigenvalue problem.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Guo-Jun Qi, Charu Aggarwal, et al.
IEEE TPAMI
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences