Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Paper
Multidimensional lines II: proximity and applications
Abstract
To study line proximity, line neighborhoods for a topology are proposed. Results indicate that there are ambiguities in line detection for orthogonal coordinates that are eliminated in parallel coordinates. An application to air traffic control for an information display and an algorithm for collision avoidance are illustrated.
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