PaperAnode hole injection, defect generation, and breakdown in ultrathin silicon dioxide filmsD.J. DiMaria, J.H. StathisJournal of Applied Physics
PaperLocation of positive charges in SiO2 films on Si generated by vuv photons, x rays, and high-field stressingD.J. DiMaria, Z.A. Weinberg, et al.Journal of Applied Physics
PaperSilicon Oxidation Studies: Morphological Aspects of the Oxidation of Polycrystalline SiliconE.A. Irene, E. Tierney, et al.JES
PaperOxide scaling limit for future logic and memory technologyJ.H. Stathis, D.J. DiMariaMicroelectronic Engineering
