Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Monte Carlo methods are used to evaluate pressure, energy, and specific heat for solid and liquid argon for volumes and temperatures at or near melting. The potential energy is assumed to be the sum of pair-wise-additive potentials recently determined by Barker and co-workers plus the Axilrod-Teller three-body interaction. Quantum corrections are included. The agreement with presently available high-pressure data is excellent. © 1973 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Peter J. Price
Surface Science
Eloisa Bentivegna
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures