Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper considers the transportation problem, both in the standard form and in the case where flow is prohibited on some arcs. We review the celebrated Monge sequence result for the standard problem, give an antimatroid interpretation of an algorithm for constructing Monge sequences or determining that none exist, and extend this algorithm and the antimatroid interpretation to include the case of forbidden arcs. © 1990.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A.R. Gourlay, G. Kaye, et al.
Proceedings of SPIE 1989
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
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International Journal of Modelling, Identification and Control