Modification of the PHI sample mount for multiple- or micropositioning for Zalar rotation

I.K. Pour, D.J. Krajnovich, et al.

SPIE Optical Materials for High Average Power Lasers 1992

A. Gangulee, F.M. D'Heurle

Thin Solid Films

J.H. Kaufman, Owen R. Melroy, et al.

Synthetic Metals

William Hinsberg, Joy Cheng, et al.

SPIE Advanced Lithography 2010