Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The 2×8 reconstruction of Ge films of Si(100) is shown to arise from ordered arrays of rebonded missing dimers (RMD s). Such a reconstruction was suggested by Pandey for Si(100). However, because of their large tensile stress, RMD s are much more energetically favorable in epitaxially compressed Ge films. For Si(100), RMD s have a very small energy, and their presence may account for the puzzling discrepancy between theory and experiment for the stress anisotropy. © 1992 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
Ellen J. Yoffa, David Adler
Physical Review B
K.N. Tu
Materials Science and Engineering: A