The 19F(p, α0)16O nuclear reaction seems to be an excellent method for high resolution fluorine depth profiling. Target tilting, a pulse pileup rejection circuit and a high resolution solid state detector were employed. Magnesium fluoride, calcium fluoride and fluorohydrocarbon targets of different thickness were used. The detection of the outcoming alpha particles was done with and without Kapton foils. A depth profile resolution of 10 nm was obtained and 3 nm appears to be feasible. © 1987 Elsevier Science Publishers B.V. (North-Holland Physics Publishing Division) All rights reserved.