Tymon Barwicz, Swetha Kamlapurkar, et al.
OFC 2017
We demonstrate a new method for imaging vertical and near vertical surface features by atomic force microscopy (AFM). It is based on an attractive force mode AFM, equipped with a special boot-shaped tip, coupled with a measurement of slope and with a special tracking technique. Surface profiling is achieved through a novel servo and scanning system. Mapping sidewall profile opens the door to measurement of critical dimensions (width and wall angles) of lines and trenches in integrated circuits, with high accuracy.
Tymon Barwicz, Swetha Kamlapurkar, et al.
OFC 2017
Eric J. Zhang, Laurent Schares, et al.
CLEO 2018
David W. Abraham, Yves Martin, et al.
Proceedings of SPIE 1989
Yves Martin, Swetha Kamlapurkar, et al.
ECTC 2019