Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Metal-polymer chemistry. II. Chromium-polyimide interface reactions and related organometallic chemistry

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We have studied the reactions occurring for the deposition of chromium onto pyromellitic dianhydride-4,4-oxydianiline (PMDA-ODA) polyimide for a wide range of metal coverages, using x-ray photoelectron spectroscopy as well as solution studies of model compounds. A multistep, coverage-dependent mechanism is proposed which includes an initial electron transfer from Cr to PMDA-ODA, followed by formation of Cr-O and Cr-N polymer-bound intermediates. At higher metal coverage, Cr-oxides and Cr-nitrides are formed which may activate the polymer for subsequent formation of Cr-carbide. In the course of this work we have shown that similarities exist between the chemistry of metal atoms in condensed phases and the reactions occurring between metal atoms and surfaces. © 1988, American Vacuum Society. All rights reserved.