Veeraraghvan S. Basker, Theodorus E. Standaert, et al.
VLSI Technology 2010
The paper on which this article is based is reprinted with permission from the Institute of Environmental Sciences Proceedings, Annual Technical Meeting, 1991. The authors discuss the results of work undertaken to compare several different types of particle counters, having different flow rates and particle size detection abilities, when tested in a small cleanroom under both normal and reduced-flow operating conditions.
Veeraraghvan S. Basker, Theodorus E. Standaert, et al.
VLSI Technology 2010
Laura B. Rothman, R.J. Miller, et al.
Journal of the IES
Chung-Hsun Lin, R. Kambhampati, et al.
VLSI Technology 2012
Douglas W. Cooper
Microcontamination