Publication
Applied Physics Letters
Paper

Measurement of the velocity distribution of sputtered Na atoms from NaCl by Doppler shift laser fluorescence

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Abstract

The velocity distribution of sputtered Na atoms from NaCl during 15 keV, Ar+ bombardment was measured by a Doppler shift laser fluorescence technique. Contrary to other measurements, the sputtered Na atoms were found to have a velocity distribution identical to that of a three-dimensional Maxwell-Boltzmann gas.

Date

01 Dec 1981

Publication

Applied Physics Letters

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