Yu-Ming Lin, Hsin-Ying Chiu, et al.
IEEE Electron Device Letters
A technique is presented to measure the temperature of a large, dense, CMOS clock buffer while it is operating. The technique uses the subthreshold slope of a single pFET, thereby avoiding introducing special technology enhancements for thermal sensing, and uses purely simple electrical measurements. The technique is demonstrated to work in the presence of high-frequency digital switching in a realistic test site fabricated in a 14 nm finFET technology.
Yu-Ming Lin, Hsin-Ying Chiu, et al.
IEEE Electron Device Letters
Xiaoxiong Gu, Joel A. Silberman, et al.
IEEE Transactions on CPMT
Franco Stellari, Alan J. Weger, et al.
ESSDERC/ESSCIRC 2004
Wenjuan Zhu, Damon B. Farmer, et al.
Applied Physics Letters