John U. Knickerbocker, Paul S. Andry, et al.
IBM J. Res. Dev
A technique is presented to measure the temperature of a large, dense, CMOS clock buffer while it is operating. The technique uses the subthreshold slope of a single pFET, thereby avoiding introducing special technology enhancements for thermal sensing, and uses purely simple electrical measurements. The technique is demonstrated to work in the presence of high-frequency digital switching in a realistic test site fabricated in a 14 nm finFET technology.