William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Matrix variational method for electron-atom scattering
Abstract
Computational and data-handling algorithms are given for a matrix variational method designed for a broad class of problems in the quantum theory of electron-atom scattering. As implemented, the method is applicable to low energy elastic or inelastic electron scattering by a neutral atom of arbitrary shell structure. © 1973.
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