Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Computational and data-handling algorithms are given for a matrix variational method designed for a broad class of problems in the quantum theory of electron-atom scattering. As implemented, the method is applicable to low energy elastic or inelastic electron scattering by a neutral atom of arbitrary shell structure. © 1973.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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IEEE Transactions on Pattern Analysis and Machine Intelligence
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International Journal of Modelling, Identification and Control
Matthew A Grayson
Journal of Complexity