Machining Integrated Optical Structures in Photoresist

Paper

01 Jan 1973

Abstract

No abstract available.

Conference paper

F.H. Dill

ISSCC 1963

Conference paper

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Proceedings of SPIE 1989

Paper

H.N. Yu, F.H. Dill

IEEE T-ED

Paper

Michael G. Rosenfield, Douglas S. Goodman, et al.

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena