Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A scanning tunneling microscope operating at cryogenic temperatures is described. Results from topographic and spectroscopic measurements are presented for surfaces of NbN and graphite at a temperature of 6.5 K. A unique feature of this system is the very low spatial drift and the resulting high positional stability. The topographic data on NbN display a grainy structure. No indications for a superconductive energy gap are found from the tunnel spectroscopy. In the ordered graphite structure, domains are found separated by dislocations. © 1987.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.W. Gammon, E. Courtens, et al.
Physical Review B
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME