C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
No abstract available.
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films