Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
No abstract available.
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010