The early history and future of the SEM
Oliver C. Wells, David C. Joy
Surface and Interface Analysis
Low voltage scanning electron microscopy is an important part of microelectronic inspection technique. This makes it possible to examine devices without changing the electrical properties, and to examine nonconducting samples such as photoresist without the use of a surface metal layer. The secondary electron imaging method suffers, however, from the difficulty that the image can be spoiled by slight charging of the specimen by the incident electron beam. This problem can be solved by the use of the low-loss electron image.
Oliver C. Wells, David C. Joy
Surface and Interface Analysis
Oliver C. Wells, Conal E. Murray, et al.
Review of Scientific Instruments
Oliver C. Wells
Applied Physics Letters
Oliver C. Wells, Catherine A. Stoye
Journal of Microscopy