Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
01 Jan 1988

Low-energy neutral/ion backscattering at As/Si(001)

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Abstract

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Date

01 Jan 1988

Publication

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Authors

  • H. Niehus
  • K. Mann
  • B.N. Eldridqe
  • M.L. Yu
IBM-affiliated at time of publication

Topics

  • Physical Sciences
  • Materials Discovery

Resources

  • Publication

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