PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsPaperLow-energy neutral/ion backscattering at As/Si(001)Journal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1988PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsAuthorsH. NiehusK. MannB.N. EldridqeM.L. YuIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare