Local electrochemical oxidation/reduction: First step towards a new lithography?

Abstract

We have recently shown that it is possible to electrochemically oxidize c-axis La2CuO4 thin films grown on different substrates. The electrochemical oxidation was subsequently performed on a local scale, i.e. oxygen-rich regions were induced in an otherwise oxygen deficient matrix. This extra oxygen created superconducting regions in the insulating matrix, This new lithographic technique does not require the addition or removal of large amounts of material, nor does it induce significant height differences.