I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
From an analysis of P31 nuclear-magnetic-resonance spectra, the chemical nature and local bonding of phosphorus in samples of amorphous hydrogenated silicon (a-Si) have been determined. Overlapping spectra of threefold- and fourfold-coordinated phosphorus may be separated on the basis of dipolar couplings and identified on the basis of chemical shifts. At low concentrations of phosphorus, the ratio of threefold- to fourfold-coordinated phosphorus is approximately 4 to 1. The magnitudes of the P31-H1 and H1-H1 dipolar couplings indicate that fourfold-coordinated phosphorus is located at internal hydrogenated surfaces. Finally, the increase of fourfold-coordinated sites in compensated a-Si suggests the formation of boron-phosphorus complexes. © 1983 The American Physical Society.
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997