Publication
Physics in Technology
Paper

Lithography and microscopy with X-rays

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Abstract

In this review of recent progress in lithography and microscopy by X-rays the authors show how X-ray lithography is used to replicate microcircuit patterns with dimensions below 1 mu m, and how these advances have improved the older technique of X-ray microradiography.

Date

01 Dec 1977

Publication

Physics in Technology

Authors

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