P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Lithographic image simulations
Abstract
Lithographic aerial images have been studied by digital image simulation. The aspects considered include the variation of numerical aperture, defocus, aberrations, source size, source shape, and source centration. © 1985.
Related
K.A. Chao
Physical Review B
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Paper
The DX centre
T.N. Morgan
Semiconductor Science and Technology