Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Paper
Lithographic image simulations
Abstract
Lithographic aerial images have been studied by digital image simulation. The aspects considered include the variation of numerical aperture, defocus, aberrations, source size, source shape, and source centration. © 1985.
Related
A. Gangulee, F.M. D'Heurle
Thin Solid Films
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
Ronald Troutman
Synthetic Metals