Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Paper
Lithographic image simulations
Abstract
Lithographic aerial images have been studied by digital image simulation. The aspects considered include the variation of numerical aperture, defocus, aberrations, source size, source shape, and source centration. © 1985.
Related
Conference paper
Soft x-ray diffraction of striated muscle
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Hiroshi Ito, Reinhold Schwalm
JES
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters