Lithographic image simulations

Douglas S. Goodman

doi:10.1016/0167-9317(85)90045-0

Microelectronic Engineering

Paper

01 Jan 1985

Lithographic image simulations

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Abstract

Lithographic aerial images have been studied by digital image simulation. The aspects considered include the variation of numerical aperture, defocus, aberrations, source size, source shape, and source centration. © 1985.

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