Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Lead feldspar, PbAl2Si2O8. and solid solutions of the system PbAl2Si2O8—KAlSi3O8 have been synthesized. Lattice parameters of PbAl2Si2O8 are: a = 8.415 ± 0.005, b = 13.063 4; 0.006, c = 7.162 ± 0.004 Å, ß = 115°8′ ± 2′. Possible space groups are C2/cm, C2 and Cm. For compounds of feldspar type a linear relationship between the lattice constant a and the corresponding cation radii was found. The lead feldspar fits well into this relation. © 1971, Walter de Gruyter. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films