William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Rafae Bhatti, Elisa Bertino, et al.
Communications of the ACM
Rajeev Gupta, Shourya Roy, et al.
ICAC 2006
M.J. Slattery, Joan L. Mitchell
IBM J. Res. Dev