Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
The reaction behavior of Cu, Ag and Au exposed to Cl2 and the laser stimulated desorption (chemical etching) of the chlorinated surfaces have been studied. The desorption yields and the mass and velocity distributions of desorbed particles due to irradiation by visible and ultraviolet laser pulses are determined by time-of-flight mass spectrometry. The study reveals desorption mass distributions very different from the thermal process and the desorbed atomic and molecular species possessing very high kinetic energies. The possible electronic excitation mechanisms are discussed. © 1986.
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
E. Burstein
Ferroelectrics
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter