Paper
The DX centre
T.N. Morgan
Semiconductor Science and Technology
A simple interferometric technique is described for monitoring thickness changes in solution‐cast polymer films as they are dried and cured. This paper follows a freshly spun solution of polyamic acid in NMP as it is converted into a cured polyimide film of 6 μm in thickness. The technique is shown to be nearly quantitative despite the effects of thermal expansion and cure‐related refractive index changes. Copyright © 1987 John Wiley & Sons, Inc.
T.N. Morgan
Semiconductor Science and Technology
J.A. Barker, D. Henderson, et al.
Molecular Physics
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
M.A. Lutz, R.M. Feenstra, et al.
Surface Science