Ronald Troutman
Synthetic Metals
Laser-induced fluorescence is used to detect a variety of silicon-containing diatomic radicals produced by the reactive ion etching and glow discharge sputtering of silicon and its oxide and nitride. The products include SiN, SiO, and SiF. Examination of the concentration of these molecules as a function of plasma conditions provides information about their production mechanisms.
Ronald Troutman
Synthetic Metals
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J.H. Stathis, R. Bolam, et al.
INFOS 2005
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990