Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Present processes for generating metallized patterns for microcircuitry involve many steps including mask fabrication. Maskless metallization of patterns at acceptable resolution would reduce the number of processing steps, add flexibility to the production scheme and facilitate repair of circuitry. Laser enhanced deposition of gold and other metals is believed to represent a significant advance in this field. © 1982 World Gold Council.
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films