S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Present processes for generating metallized patterns for microcircuitry involve many steps including mask fabrication. Maskless metallization of patterns at acceptable resolution would reduce the number of processing steps, add flexibility to the production scheme and facilitate repair of circuitry. Laser enhanced deposition of gold and other metals is believed to represent a significant advance in this field. © 1982 World Gold Council.
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Robert W. Keyes
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films