A. Gupta, B.W. Hussey, et al.
Materials Research Bulletin
Superconducting YBa2Cu3O7-δ has been etched using a focused cw Ar+ laser beam in KOH solution. The results indicate clean and rapid removal of reaction products leaving high aspect ratio grooves. Etch rates are investigated under several conditions; etch geometry is discussed as a function of laser power density and scan speed. The surface reaction with KOH is thermally activated, and the residual material is identified by energy dispersive x-ray spectroscopy, x-ray powder diffraction, and chemical analysis.
A. Gupta, B.W. Hussey, et al.
Materials Research Bulletin
A.G. Schrott, J.A. Mishwich, et al.
Materials Research Society Symposium - Proceedings
C.C. Tsuei, J.R. Kirtley, et al.
Physical Review Letters
F. Kober, R.P. Huebener, et al.
Physica B: Condensed Matter