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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Laser-assisted etching of YBa2Cu3O 7-δ
Abstract
Superconducting YBa2Cu3O7-δ has been etched using a focused cw Ar+ laser beam in KOH solution. The results indicate clean and rapid removal of reaction products leaving high aspect ratio grooves. Etch rates are investigated under several conditions; etch geometry is discussed as a function of laser power density and scan speed. The surface reaction with KOH is thermally activated, and the residual material is identified by energy dispersive x-ray spectroscopy, x-ray powder diffraction, and chemical analysis.
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