Laser - assisted chemical etching

Abstract

Laser-induced or -enhanced chemical etching of solid surfaces has provided an important new tool in recent years for materials processing. Studies have been reported on a wide range of substrates, including semiconductors, metals, ceramics, glasses and thin organic films. In this paper the current status of the field is reviewed. Characteristics of laser etching of various materials are described. Activities related to applications and to fundamental understanding of the process are also discussed. © 1984 SPIE.