M.R. Melloch, J. Woodall, et al.
Annual Review of Materials Science
No abstract available.
M.R. Melloch, J. Woodall, et al.
Annual Review of Materials Science
E.A. Fitzgerald, G.P. Watson, et al.
Journal of Applied Physics
M.I. Nathan, T.N. Jackson, et al.
Journal of Electronic Materials
R.A. Kiehl, M.A. Olson, et al.
IEDM 1988