About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Nuclear Instruments and Methods In Physics Research
Paper
Ion-implanted polysilicon diffusion sources
Abstract
SIMS and TEM techniques are employed to study redistribution of boron and arsenic implanted into polysilicon deposited on crystalline silicon substrates. Various implant conditions and thermal treatments are included. The interface between the poly and single crystal Si strongly influences the dopant distribution. Morphology changes are also affected by the interface and play an important roll in the dopant redistribution. Interactive effects between boron and arsenic are observed in polysilicon which are attributed to the electric field generated by the arsenic gradient. The quality of the interface is associated with the quantity of oxygen, flourine, and carbon found in that region. © 1983.