Digital noise-tolerant silicon nanophotonic switch
Joris Van Campenhout, William M. J. Green, et al.
CLEO/QELS 2010
We report the performance of NiSi-based heaters integrated with submicrometer silicon waveguides. The heaters were fabricated using a standard complementary metal-oxide-semiconductor (CMOS) silicidation process on a thin silicon slab laterally connected with a silicon rib waveguide. The intrinsic properties of such NiSi waveguide heaters were characterized by using them as thermo-optic phase shifters in a MachZehnder interferometer. The power consumption Pπ for obtaining a π phase shift was measured to be as low as 20 mW, using CMOS-compatible drive voltages. The time constant of the thermo-optic response was less than 2.8 μs. Simulations suggest that a further reduction in the power consumption Pπ is feasible. © 2010 Optical Society of America.
Joris Van Campenhout, William M. J. Green, et al.
CLEO/QELS 2010
Jie Gao, Xiaodong Yang, et al.
CLEO 2009
Solomon Assefa, William M. J. Green, et al.
URSI GASS 2011
Benjamin G. Lee, Christian Baks, et al.
PHO 2011