Dynamic Optical Fringe Suppression for Silicon Photonic Sensors
Chu C. Teng, Eric J. Zhang, et al.
CLEO 2018
We report the performance of NiSi-based heaters integrated with submicrometer silicon waveguides. The heaters were fabricated using a standard complementary metal-oxide-semiconductor (CMOS) silicidation process on a thin silicon slab laterally connected with a silicon rib waveguide. The intrinsic properties of such NiSi waveguide heaters were characterized by using them as thermo-optic phase shifters in a MachZehnder interferometer. The power consumption Pπ for obtaining a π phase shift was measured to be as low as 20 mW, using CMOS-compatible drive voltages. The time constant of the thermo-optic response was less than 2.8 μs. Simulations suggest that a further reduction in the power consumption Pπ is feasible. © 2010 Optical Society of America.
Chu C. Teng, Eric J. Zhang, et al.
CLEO 2018
Benjamin G. Lee, Solomon Assefa, et al.
CLEO 2011
Yurii Vlasov, William M. J. Green, et al.
OFC/NFOEC 2008
Benjamin G. Lee, Christian Baks, et al.
PHO 2011